Used CANON FPA 3000 EX5 #9114042 for sale

Manufacturer
CANON
Model
FPA 3000 EX5
ID: 9114042
Stepper.
CANON FPA 3000 EX5 is an advanced, high-performance wafer stepper used for the fabrication of semiconductor devices. This wafer stepper is specifically designed to create extremely precise patterns and structures on substrates such as silicon wafers and semiconductor thin films. This equipment features an ultra-high resolution of 5nm, making it an excellent choice for researchers and scientists who need to produce detailed patterns and structures. CANON FPA-3000EX5 is equipped with advanced optics, specifically a high-performance immersion objective lens and high-NA control system that can precisely focus the beam and ensure patterning accuracy. In addition to the optics, the unit also incorporates an advanced high-sensitivity charge-coupled device (CCD) camera with a 6.2 Megapixel resolution. This provides researchers with a powerful tool for measuring tiny features with very high accuracy. The machine is further configurable with up to three separate exposure heads, which can be used to accurately align multiple wafers in a single setup. This allows the tool to image and pattern multiple substrates in a single step, which dramatically increases throughput and cost effectiveness. FPA 3000 EX5 utilizes a variety of scanning methods to ensure that each pattern is accurately replicated. With a wide range of scan speeds, researchers can make sure they are making the most of their time. Scanning rates can reach more than 100mm/s, allowing researchers to increase their productivity. The asset also offers a choice between Non-Gaussian and Gaussian patterning, allowing them to select the best method for their specific application. FPA-3000EX5 also features a variety of interfaces that enable users to input data and control the model remotely. This allows users to quickly and easily program the equipment to meet their needs, making it an invaluable resource for advanced industrial applications. Finally, the system is designed for long-term reliability and repeatable accuracy, ensuring that even the smallest of details are consistently produced. These features have firmly established CANON FPA 3000 EX5 as an advanced, reliable, and cost-effective wafer stepper.
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