Used CANON FPA 3000 EX6 #293817785 for sale

CANON FPA 3000 EX6 is a wafer stepper designed for semiconductor production and research and development. It is an advanced stepper with a 6X reduction ratio, providing higher uniformity and overlay performance, and is capable of processing up to 300 mm wafers. CANON FPA-3000EX6 is the latest generation of CANON field proven lithography equipment. It is a groundbreaking compact stepper that is capable of achieving high precision lithography performance. It features a 6X reduction that translates to significantly more accuracy and uniformity. With this 6X reduction ratio and higher overlay alignment accuracy, it produces geometrical defects as small as 1.5 nm. This system also features a wide range of exposure wavelengths for special photoresists, from 365nm to 248nm. FPA 3000 EX6 offers excellent masking accuracy and uniformity, using specialized mask imaging methods. The specialized optical unit and maskless lithography techniques provide the highest accuracy and uniformity possible. It also has an advanced high-speed scan stage that can move up to 4mm/sec and accurately scan a wafer in 10 seconds. The machine is designed to provide the highest level of process control, with a host of integrated features and advanced process control tools. It has convenient user-friendly operator interfaces for intuitive control. The tool is equipped with the state-of-the-art highly reliable and robust Quattro series software and process control modules. In terms of flexibility, FPA-3000EX6 can be configured and upgraded easily. It offers a wide range of OPc, Overlay, Pitch and Alignment control through multiple exposures, and also provides flexibility in a wide range of working stages, chuck and substrate alignment options, field sizes and positional accuracy. The asset is designed to run in clean-room to minimise contamination. The model is vented to 10,000 class, and can be connected to an inert gas supply. The Advanced Cooling Equipment assures the correct and stable operating temperature while operating in a harsh environment. CANON FPA 3000 EX6 offers impeccable process performance, flexibility and user-friendly operation. It is the perfect choice for advanced semiconductor and nanotechnology manufacturers.