Used CANON FPA 3000 i4 #293587251 for sale

CANON FPA 3000 i4
Manufacturer
CANON
Model
FPA 3000 i4
ID: 293587251
i-Line stepper 0.35µm.
CANON FPA 3000 i4 is a combination scanner, stepper, and lithography equipment designed to provide advanced, high-performance lithographic exposure capabilities. The system is tailored to handle a variety of applications that involve advanced optical imaging and patterning, including reticles and non-reticle exposure of photomasks and wafers. CANON FPA-3000I4 can be used in multiple industries, including semiconductor, life sciences, biotechnology, and optoelectronic research and development. The unit provides repeatable and reliable results, and excellent image quality for a variety of processes and materials. For increased performance, FPA 3000I4 incorporates the latest in imaging technology, including deep-UV CANON ARCOS and vector scanning support, enabling scanning speeds up to 150mm/sec. The machine utilizes an advanced 3-axis optical stage and an F-Theta lens that provide highly accurate alignment and focusing throughout the entire process. This ensures precise, accurate exposure of patterns to processing materials with every exposure. Additionally, FPA-3000I4 features a high-precision alignment tool that provides ±1µm accuracy with an accuracy index of 0.2µm or better. FPA 3000 I 4 is designed to be highly reliable, providing consistently accurate and stable exposure performance. To this end, the asset offers numerous features that ensure excellent process stability throughout the entire exposure cycle. This includes a robust vacuum model, a closed-loop conveyor control equipment, a reliable power supply, and a sophisticated temperature control system. The unit also provides many user-friendly features, making it easy to operate. It offers an intuitive graphical user interface (GUI) for controlling image parameters and exposure settings. Additionally, the machine provides support for a variety of data formats, including GDSII, OASIS, and TIFF. For precise and accurate lithographic exposure, CANON FPA 3000 I 4 offers a combination of advanced imaging and patterning technologies, precise alignment capabilities, and user-friendly features. This makes it an ideal solution for a variety of industries.
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