Used CANON FPA 3000 i4 #293605760 for sale

CANON FPA 3000 i4 is a high-end EUV (Extreme Ultra-Violet) lithographic scanner used in semiconductor manufacturing. It is a reliable and advanced wafer stepper designed to provide high precision lithography processes. The i4 has a dual-column structure and consists of a two-stage scanning platform and a highly-integrated wafer handling system. It also utilizes CANON 'Roll-Scanner' technology. This means that the image data is registered electronically after being exposed on the surface of the wafer, so that it can be transferred and registered quickly and accurately. CANON FPA-3000I4 wafer stepper has a laser source with a 13.5nm wavelength which allows for higher precision and highly accurate placement of patterns on the wafer. The i4 also incorporates a high repetition rate of up to 12kHz, allowing for large exposures in a single shot. The i4 offers high throughput rates, delivering productivity gains of up to 400wpm (wafers per minute). This is made possible by the high repetition rate and rapid transfer of data, as well as its short preparation time in between duty cycles. The wafer stepper also has an excellent resonance scanning system that minimizes distortion of the pattern caused by acceleration and vibrations. This allows for high accuracy in device pattern formation. Finally, it uses low thermal drift and an independent stable lens system to help prevent aberration and distortion. This ensures accurate exposure of patterns on the wafer, thereby improving the yield and cost-performance of semiconductor devices. In summary, FPA 3000I4 wafer stepper is an advanced and reliable lithography machine suitable for manufacturing high-end semiconductor devices.