Used CANON FPA 3000 i4 #293606921 for sale

CANON FPA 3000 i4
Manufacturer
CANON
Model
FPA 3000 i4
ID: 293606921
i-Line stepper.
CANON FPA 3000 i4 is a result of decades of research and advancements in wafer stepper technology. This wafer stepper is capable of delivering high levels of precision and accuracy for device fabrication, making it an ideal choice for a number of applications. CANON FPA-3000I4 offers industry-leading performance, with a speed spec of up to 4800 wafers-per-hour (wph) and a resolution specification of 0.21µm. It utilizes a full field of view of up to 125mm, and provides driftless performance, ensuring consistent focus and accurate patterning. Its light source is a kryptane hollow cathode lamp, with the ability to precisely produce the required output for each exposure. FPA 3000I4 utilizes a 2-dimensional XY stage that is capable of fast acceleration and low vibration, along with a wafer floor capable of being placed at any desired setting. Its alignment system also provides a high level of precision, with a marks detection that can accurately recognize marks even if they are as small as 25nm in size. In addition, FPA-3000I4 is equipped with the highly advanced, user-friendly Canirecord EX-L software, which provides a variety of options for process automation and real-time monitoring. This intuitive, high performing platform allows the user to monitor processes up to the wafer level, for increased accuracy and more efficient usage. FPA 3000 i4 also features a powerful 200mm CCD imaging system, which can perform a variety of inspections with a high level of accuracy, including defect detection, high-dynamic range imaging, overlay measurements, and 3-dimensional measurements. Overall, CANON FPA-3000 I4 is an incredibly advanced piece of technology that offers a wide range of features and capabilities. Its cutting-edge features, along with its reliability and responsiveness, makes it an ideal choice for a number of precision fabrication applications.
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