Used CANON FPA 3000 i4 #293607519 for sale

Manufacturer
CANON
Model
FPA 3000 i4
ID: 293607519
Wafer Size: 8"
Vintage: 1994
i-Line stepper, 8" Does not include Hard Disk Drive (HDD) 1994 vintage.
CANON FPA 3000 i4 is a wafer stepper from CANON that is used for semiconductor manufacturing and testing. The equipment features a built-in 4-axis alignment system that ensures accurate alignment of the wafer for light exposure and laser alignment. It is capable of creating feature sizes down to 0.2 microns, and has a maximum resolution of up to 0.5-micron pixels. One of the unique features of the unit is the NDUV (near-ultraviolet) light source, which provides both long wavelength (UV-A) and short wavelength (UV-B) illumination. This allows for contrasting and sharpening of images and accurate measurements, even when working with difficult-to-resolve semiconductor materials such as copper and high-k dielectrics. The stepper utilizes an advanced scanning machine to accurately focus on fine details and prevent image smearing. It is capable of scanning at up to 2.3 µm/s, significantly faster than conventional high-end steppers. Additionally, it can support a wide range of optics and lenses, including lenses with an NA of up to 0.5. The tool can be integrated with several different types of detection devices, including CCD cameras. Additionally, it features a host of environmental controls, such as temperature, humidity and inert gas for accurate and consistent results. CANON FPA 4000 i4 is also expandable, and allows for the addition of a variety of other sensors and devices. Finally, the asset has a number of safety features, including dust protection, shutter control, and auto shutdown. It also includes operator health monitoring to ensure that it remains safe for use in cleanroom environments. CANON FPA-3000I4 is a cutting-edge wafer stepper that is capable of measuring and exposing semiconductor wafers down to the nanometer level with high accuracy and speed. Through its features and versatile platform, it is an ideal choice for IC solutions across a variety of industries.
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