Used CANON FPA 3000 i4 #9121238 for sale

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Manufacturer
CANON
Model
FPA 3000 i4
ID: 9121238
Wafer Size: 8"
Vintage: 1995
i-Line stepper, 8" Reticle: 6" I/F: Mark-8 1995 vintage.
CANON FPA 3000 i4 is a wafer stepper of the highest accuracy and size capabilities in the market. This fully automated equipment is a photon lithography stepper equipped with CANON original technologies, such as an advanced large scale integration (A-LSI) device and its proprietary scanning mechanisms, to provide high performance and reliability in its field. The system is composed of a main unit, an optical head and a pattern generator. The main unit is a heavy-duty frame that ensures stability and accuracy. It is also equipped with a precision feed mechanism, to guarantee the smooth movement of the optical head in three dimensions, a high precision metrology unit for best positioning accuracy, and a cylindrical motor for fast, efficient and accurate scanning. The optical head is comprised of a first-order aberration-corrected lens machine, providing superior image quality and resolution of 4 nm linewidths on wafer diameters up to 25mm. An environmental chamber with heating functions is also part of the optical head to ensure the best working conditions and a steady process. The pattern generator is a projection optics component used to transfer the circuit pattern onto the wafer. It is equipped with a dual pixel chip to achieve a fast process speed and sequencing capabilities, allowing the tool to work with various circuit patterns and exposures. CANON FPA-3000I4 is capable of providing 4nm linewidths at resolutions up to 2.5μm, making it ideal for all levels of semiconductor production, including advanced packaging. Its stepper technology is also applicable to the fabrication of larger components in various industries such as printing and electronics. In combination with a fully automated environment and digital operation, this asset guarantees the highest level of precision and reliability for a wide range of applications.
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