Used CANON FPA 3000 i4 #9238727 for sale
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CANON FPA 3000 i4 is a highly advanced, multi-stage projection aligner designed for advanced semiconductor manufacturing. CANON FPA-3000I4 employs the latest technology available to create precise resolutions and alignment of 20-200 nanometer components. Its advanced projection Optics Equipment allows for uncorrected resolutions of 2 nanometers, enabling precise placement and alignment of challengingly small semiconductor components with great accuracy. It is fully integrated with an onboard real-time metrology system (RTSM) which permits active 3D alignment and registration of components. FPA 3000I4 is extremely energy efficient. It features a low-noise, silent cooling unit and a variety of innovative illumination systems; the four-beam Illumination Machine (IFIS) featuring highly efficient halogen, Ar+ metal halide, and i-line light sources. This ensures precise and uniform exposure of components over a wide range of wafer sizes and materials. The robust and precise mechanism enables high-speed and precise movement in all directions delivering an unparalleled level of accuracy and repeatability. The projection Head incorporates a highly precise, precise stage-compensation tool which, combined with the advanced RTSM and highly precise optics, provides for the precise placement of parts down to 20 nanometers. FPA-3000 I 4 also houses a fully automated application development environment in which users can develop custom software routines to facilitate the advancement and development of increasingly efficient semiconductor processes. Finally, CANON FPA 3000I4 also provides significant operational support, including asset traceability capabilities and easily interchangeable components for simplified maintenance and upgrades. The FPA further provides for safe and secure operation and facilitates user training, allowing for faster entry into complex lithography operations.
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