Used CANON FPA 3000 i4 #9238745 for sale

CANON FPA 3000 i4
Manufacturer
CANON
Model
FPA 3000 i4
ID: 9238745
Stepper.
CANON FPA 3000 i4 Wafer Stepper is a semiconductor imaging tool ideal for wafer level photolithography applications. This equipment features 4 highly-sensitive projection optics, optimized to deliver superior resolution and high-speed process speeds with minimal distortion. CANON FPA-3000I4 is especially suited for maskless lithography applications with its Perfect Layer Transfer Technology, which ensures accurate wafer-level operating accuracy with minimal edge dosaging effects. To ensure superior image quality, FPA 3000I4 utilizes a 40nm numerical aperture optical system, automated alignment and adjustment using an automated measurement tool, and an effective chemical overcoat for scar-resistant and scratch-proof substrate protection. Furthermore, this unit incorporates advanced illumination methods, such as full uniformity lighting, to minimize variation in the projected pattern. The tool's built-in process control, motion stability, and process monitoring capabilities all work towards making yield maximization and cost reduction possible, while its pre-approved process-machine configuration eliminates variability in the processes. Other performance boosters built into CANON FPA-3000 I4 are its advanced temperature control for the stage surface and its Contour Technology, which improves process results by compensating for non-flat surfaces. The tool's streamlined features and superior characteristics make CANON FPA-3000 I 4 a valuable asset in the semiconductor production line, ensuring high throughput rates and superior lithography results. Using this asset, manufacturers can now achieve low line-end pull-back, excellent CD uniformity, high-resolution line patterning, and accurate overlay alignment, all with minimal dosage area discrepancy. Furthermore, this tool is designed to facilitate easy model expansions and upgrades, making FPA-3000 I 4 an ideal investment for industries seeking a reliable, cost-efficient, and productive lithography solution.
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