Used CANON FPA 3000 i4 #9402495 for sale

CANON FPA 3000 i4
Manufacturer
CANON
Model
FPA 3000 i4
ID: 9402495
Stepper i-Line stepper With lends data Wave length: 0.35 µm.
CANON FPA 3000 i4 is a 5-axis wafer stepper device designed for advanced lithography applications in semiconductor fabrication and research. It features a unique linear acceleration/deceleration mechanism plus a 9-axis motion equipment for 3D field correction, making it capable of delivering highest resolution in optical lithography applications. The integrated image-forming circuit and the built-in optics system ensures accurate alignment of the wafer stage, resulting in increased throughput and reliability. CANON FPA-3000I4's automated alignment unit uses two sets of auto-alignment sensors to achieve fast, precise alignment between the mask and wafer stage. This machine uses laser deflectors and a laser signal interface for proper lens positioning and beam alignment. Furthermore, this tool is capable of handling a large variety of wafer types, providing know-how for stepper programming and enhanced wafer performance; both of which can be used for patterned wafer fabrication. Furthermore, FPA 3000I4 features a 5x reduction scanner that allows for more accurate and higher resolution imaging. Its compact design minimizes operating space and reduces vibration, increasing accuracy. Moreover, FPA-3000 I4 is able to capture and save patterns up to 20 times faster than traditional mask writing steppers. It also provides best-in-class lithography operations such as expose, display, and pattern optimization. CANON FPA 3000I4's advanced cooling asset ensures proper thermal management, providing an stable operating environment. This model also features advanced monitoring capabilities, such as dynamic temperature correction systems that detect, measure and adjust the temperature based on the wafer condition. By leveraging on its adaptive exposure guidance, users can obtain the highest yield even in challenging lithography applications. FPA 3000 I 4 is also compliant with multiple industry standards, such as SEMI E-170 and SEMI E-182, and supports accept/reject sorting. CANON FPA 3000 I 4 is an ideal equipment for semiconductor fabrication and research, as it provides users with an advance platform for patterned wafer fabrication. It offers accuracy, sensitivity, speed, and efficiency for fixed mask, high volume production and LED lithography applications. With its intuitive controls and best-in-class feature sets, this wafer stepper provides users with all the necessary equipment they need to advance their semiconductor production needs.
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