Used CANON FPA 3000 i5 #293607520 for sale
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ID: 293607520
Wafer Size: 8"
Vintage: 1997
i-Line stepper, 8"
Does not include Hard Disk Drive (HDD)
1997 vintage.
CANON FPA 3000 i5 is a high-performance, optical processor used to produce large-scale integrated circuits. It is a state-of-the-art wafer stepper designed to produce large scale integrated circuits (LSIC) with superior precision, accuracy, and speed. This machine is characterized by its 5-axis scanning equipment, high resolution 5 µm optics, and a fast scanning speed of 6 seconds. It is equipped with Vision Control System technology, which integrates vision unit components to enable accurate alignment and placement of components on the wafer. CANON FPA 3000I5 is made up of a general purpose platform that offers a set of base components such as the optics, electronics, drive units and vision systems. The optics include a Lumicron L i5-L3 illuminator, Magnicon L i5-H3, Zeiss Kg-10i5 lenses, Oriel L7-E3, Lumenatech and a Modular Illuminator. These optics allow for highly accurate imaging, high resolution inspection, and extremely fast scanning. The electronics include a high-speed digital processing and control machine, offering maximum accuracy and control. The drive units consist of a high-powered stepper motor, driving a mechanical unit for scanning and positioning, providing smooth and accurate processing. The vision software allows for advanced inspection and alignment of components within the wafer. FPA-3000 I5 is suitable for many high-volume production processes and applications. The tool features high-precision 5 µm optics with less than 1 µm image shift and distortion, high-speed scanning of 6 seconds, and high-accuracy alignment for IC production. FPA 3000I5 can process wafers of various sizes including 200 mm, 250 mm, 300 mm and 450 mm. It also enables highly accurate silicon wafer processing, with variable overlay accuracy and throughput performance. With its revolutionary technology, this wafer stepper is an ideal choice for complex IC production applications.
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