Used CANON FPA 3000 i5 #293615952 for sale

CANON FPA 3000 i5 is a full-field wafer stepper with high-end optical performance for advanced wafer processing across multiple technologies. It is designed to provide high-precision wafer patterning and inspection capabilities, offering output of up to 200 wafers per hour. CANON FPA 3000I5 features a 5 megapixel stepper head with a 1-to-1 pixel pitch and 95 nm resolution, allowing it to achieve extremely precise image placement and alignment. It is equipped with two high-speed, dynamically reconfigurable stepper motors, ensuring fast and accurate wafer positioning and alignment. The FPA employs a fast, high-throughput optical system comprised of five lenses and a 6-position motorized mirror array, providing high-resolution imaging across a wide range of pattern sizes and simulation resolution specifications. It can process a range of materials from GaAs, Si, and SOI to quartz and advanced organic photovoltaic materials. FPA-3000 I5 is equipped with an integrated wafer-level sensor for wafer edge-alignment and low-power proximity sensing. It is also equipped with an embedded dark-field image capture mechanism for advanced wafer detection, enabling wafer surface inspection embedded within the stepper patterning operation. In addition, the stepper can support up to four PI curves for simulated target registration, enabling automated feature alignment. CANON FPA-3000 I5 is designed with a class-1000 cleanroom environment to ensure the highest reliability and operating stability. An optional sub-ambient dry chamber is available to further improve wafer flatness and reduce particulate contamination. The stepper comes with an intuitive user interface, allowing many wafer operations to be easily set and adjusted with a minimum user intervention. FPA 3000I5 is an effective and reliable wafer stepper that provides high precision and accuracy with fast throughput. Whether your goal is to improve yield and performance of your device-manufacturing process or to develop the most advanced optoelectronic materials, FPA 3000 i5 is an ideal system for your needs.