Used CANON FPA 3000 i5 #293615953 for sale

CANON FPA 3000 i5 is a wafer stepper that is designed to provide superior performance for advanced semiconductor applications. It utilizes the latest innovations in optics, lithography and motion control technologies in order to produce smaller, more precise features than traditional optical lithography methods. CANON FPA 3000I5 features a precision aligned stepper stage that is driven by high performance voice coil motors and precision tungsten linear encoders. This allows for highly accurate positioning of substrates and lenses with outstanding repeatability. The stepper is capable of handling a large range of substrates and lens sizes. With FPA-3000 I5, users have the ability to adjust their microlithography setup with a choice of optional lens assemblies, adjustable-height stepper stage, and additional lenses to accommodate large field sizes up to 800 mm in diameter. The stepper also features a high-resolution alignment equipment, which enables the user to accurately align the lenses and substrates prior to system operation. This unit can also check the alignment accuracy at each step of the lithography process. The stepper offers a wide range of illumination systems, including conventional arc lamps and advanced i-line and KrF ArF excimer lasers. This allows users to benefit from higher throughput, better imaging resolution and improved production processes. CANON FPA-3000 I5 is equipped with a variety of wafer handling tools, such as a thewafer cassette loader and robotic substrate handling machine. It also features advanced built-in automatic maintenance functions, such as self-cleaning. The stepper offers an advanced lithography software suite, with software tools for controller, pattern alignment, layout verification, microscopic inspection, process optimization, as well as motion control. The user friendly interface provides easy access to these features and functions. In addition, FPA 3000 i5 enables users to access a variety of unique features, such as automatic wafer identification and qualification, data logging and analysis, and temperature control. The tool provides a comprehensive range of reports and statistical data to ensure optimum performance. FPA 3000I5 is a rugged and reliable wafer stepper that is designed to outperform competing technologies in the semiconductor industry. With its advanced technology and capabilities, the asset provides superior performance and higher throughputs than traditional optical lithography technologies.