Used CANON FPA 3000 i5+ #293625346 for sale

CANON FPA 3000 i5+ is a state-of-the-art wafer stepper for semiconductor fabrication and imaging applications. Based on a new High-Acceptance-Rate (HAR) technology platform, it improves on traditional wafer steppers in terms of throughput, field size, cost and user flexibility. The stepper features a twin-column gantry structure design that reduces vibration and footprint size. It enables scan pattern accuracy of up to 1.1 nanometer and ensures precise alignment of a wafer in the 100 mm-500 mm range for uniform illumination and high yield of processed wafers. The system also incorporates a double-layer map-correction mechanism, which corrects distortions of the alternating phase-shift masks (PSM) and binary masks spots. This reduces overlay error and minimizes the production cost of complex devices. The stepper has a throughput of up to 65 wafers per hour in scanning mode, and up to 85 wafers per hour in scanning+queue mode with its i5+ quad-core processor and Image Logic Control Suite software. Its optomechanical design yields a high-accuracy focus correction of up to 0.2nm, leading to a high-quality surface finish. CANON FPA 3000I5+ also touts a series of advanced features, such as enhanced loading and cleaning, optical features for superior imaging, and safety features for operator convenience and protection. Its air-conditioned workspace and advanced air management, as well as its improved technological features, enable low-cost and low-noise operation. Furthermore, it incorporates a range of connectivity options, such as remote image acquisition, OPC and MES support, and system monitoring. This offers direct integration to existing fab lines and systems, making the system more efficient and ensuring cost savings. In conclusion, FPA-3000 I5+ is an advanced wafer stepper with powerful capabilities and a compact design. It offers high throughput, accuracy and yield with its latest HAR technology, and flexible options and connectivity to enable seamless integration into existing systems. Thanks to its advanced features, this stepper is a reliable tool for high-quality semiconductor fabrication and imaging.