Used CANON FPA 3000 i5+ #293817803 for sale

CANON FPA 3000 i5+
Manufacturer
CANON
Model
FPA 3000 i5+
ID: 293817803
i-Line stepper Numerical Aperture (NA): 0.45-0.63 Resolution: 350 nm DCO: 50 Throughput (wph): 100-200.
CANON FPA 3000 i5+ a wafer stepper is an advanced optical lithography equipment designed for production-level manufacturing of very delicate components on semiconductor substrates. It utilizes a high-end stepper to finely pattern substrates with sub-micron resolution. CANON FPA 3000I5+ has a high repeatability and precision level, which ensures consistent and accurate processing of very small substrates. FPA-3000 I5+ utilizes a range of advanced lithography technologies, including a step-and-repeat process for exposure accuracy, Mirror Aid Imaging (MAI) for improved image stability, and a patented resist coating technology for fine-tuned films. The system is also equipped with a high-power xenon flash lamp mated to a high-precision lens unit, providing maximum light intensity and edge-to-edge clarity and uniformity. CANON FPA 3000 I5++ comes with several additional features such as control software, a high-accuracy edge profile sensor (EPS) for substrate mapping, a cutting-edge variable-pitch conversion lens to cover a wide range of exposure fields, pellicle protection technology, and temperature control for optimum performance. FPA 3000 i5+ is designed to be modular and can be easily configured to meet specific application demands, such as high-volume production needs or specialized prototyping requirements. The wafer stepper also allows customers to configure their die stack to ensure high-resolution imaging and fast throughput times. CANON FPA-3000 I5+ offers excellent processing flexibility, including substrate-to-substrate and step-and-repeat methods. Its sophisticated lithography technology also ensures excellent film uniformity, ensuring consistent product quality. In addition, the machine's advanced control tool, computer-aided diagnostics, and comprehensive service capabilities make it an ideal solution for high-volume production runs or custom prototyping needs.
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