Used CANON FPA 3000 i5+ #293827690 for sale

CANON FPA 3000 i5+ is an advanced wafer stepper used in the manufacture of semiconductor devices and integrated circuits. This equipment boasts a range of features and benefits which include: a high-resolution alignment system which ensures precise and repeatable alignment of each die lithographically exposed; an auto-focus feature that constantly maintains sample flatness and provides higher precision focus without user adjustment; an additional 2-axis rotation stage allows finer control of the exposure dose and dose uniformity; and a high-power 8-wavelength laser which supports high throughput applications. CANON FPA 3000I5+ can also benefit from very fast sampling and step-and-repeat speeds, with a maximum controller jitter of only 10 picoseconds. With a reduced temperature fluctuation inside the device, FPA-3000 I5+ is able to keep exposure dose consistent and uniform across multiple wafers. It offers improved process reliability with a prevention of the die misalignment due to sample deformation. The ultra-precision exposure unit also allows for better die-to-die consistency and higher productivity. FPA 3000 i5+ also features an optional XY stage for additional process control capabilities. This XY stage is made of a high-performance, sealed bearing type, offering precise positioning and stability. It can also support the use of spin-master devices, allowing for more advanced process control techniques such as photoresist pattern deviation evaluation, enhanced precision alignment, and exposure dose testing. CANON FPA-3000 I5+ also has an integrated movable pallet design that allows for fast job changeovers and wafer loading. It captures all necessary information required for each batch, such as exposure settings, results, and pre-exposure recipes. With a dual-display touch panel, the operator can monitor the process status, current exposure, and recipe settings simultaneously. In conclusion, CANON FPA 3000 I5++ is a high-performance wafer stepper built for ultra-precision process control. With its high-resolution alignment machine, auto-focus and 8-wavelength laser, the 3000 i5+ is capable of precise exposures and repeatable results in high throughput applications. By incorporating an XY stage and intuitive tool design, it ensures reliable and accurate production of semiconductor devices and integrated circuits.