Used CANON FPA 3000 i5+ #293829393 for sale

CANON FPA 3000 i5+ is a compact, multi-stage field photolithography stepper with a resolution of up to 0.2 μm. It has been designed for high-precision pattern transfer to numerous wafer substrates, ranging from 5- to 200-millimeter-diameter semiconductor devices. The stepper utilizes a series of mirrors, lenses, and filters to produce patterns on the wafer using UV light. The device is based on a five-stage design, with one main stage and four independent ones. Each stage is equipped with a static and a dynamic mirror, configured for motorized XY control. The equipment is capable of accurate, repeatable alignment and exposure of several wafers in a single run with minimal downtime. It also offers a built-in motorized calibration system for consistent and accurate exposure times. The stepper can be equipped with a range of lenses, including CANON FPA-3003 I-5+, a high-resolution aspheric lens with 0.2 μm resolution. The unit can also be configured with an adjustable image field, allowing for optimal exposure of patterns with various size ranges. The stepper is compatible with a variety of imaging tools, such as Automatic fiducials, Multi-align sensors, and Air-float Z-Axis Camera systems. It also offers a variety of accuracy and repeatability features, from +/- 0.1 μm step-and-repeat to +/- 5 μm arbitrary shift moves. In addition, the stepper supports unified wafer mounts of up to ten inches in diameter, offers an automated substrate exchange machine, and is equipped with an autopositioning tool for easier substrate changing. The asset also supports a range of sensors, including auto-measurement, line-edge-detection, and contrast enhancement sensors. The stepper also incorporates thermal control and a vibration reduction model that control the temperature of the entire equipment, keeping it within a range of +3 to +20° C. It also provides a scanner system that can trace objects or points with a resolution of 0.2 μm. These features allow for high-precision pattern transfer and repeatability. Overall, CANON FPA 3000I5+ is a highly versatile, multi-stage field photolithography unit with an adjustable image field and a range of sensors. It has been designed for high-precision pattern transfer to countless different wafer substrates and is suited for numerous applications in semiconductor device production.