Used CANON FPA 3000 i5 #9194604 for sale

Manufacturer
CANON
Model
FPA 3000 i5
ID: 9194604
Vintage: 1996
i-Line stepper Console: EWS: 715/100 Built in console: X-terminal Auto feeder, 8" Type 6: Right PA Type: Flat Inline Edge exposure (EBR) Reticle size, 6" (14) Library slots Cassette type: CANON Option: BCR: No CBR: No PPC,RPC: No Wafer stage: Type: Flat Laser interfermeter: Zygo (No) Chuck type: 2-Layer pin Maintenance kit: No Active mount Illuminatior: 2kW Clean chamber: RASCO /TBW-CD-82 C-Oil level : Normal UPS: No Stepper: 3P, 200V, 33kVA Missing parts: D-Rack PCB, P/S 1996 vintage.
CANON FPA 3000 i5 is a high-performance wafer stepper designed for the most advanced semiconductor applications. This cutting-edge machine uses a unique, innovative technology called Improved Resolution Image Metrology (IRIM) that provides a 25% improvement in optical performance compared to other wafer steppers. It has an incredibly high-resolution imaging equipment that offers the most accurate inspection and inspection results. CANON FPA 3000I5 uses a high-power 5 kW diode laser for creating images of the wafer surface, which is capable of scanning at a resolution of 5 microns. The IRIM system uses laser interferometers to measure the wafer's surface profile, and provides an accurate measurement of the profile at a depth of 1 micron. This is achieved by using a diffractive optical element (DOE) to split the image into four sections, which can then be analysed by the IRIM unit for the highest degree of accuracy. The machine also utilizes an auto-focus option to ensure the highest possible accuracy of the inspection. FPA-3000 I5 has an industry-leading precision alignment tool that offers accuracy in all directions to ensure the highest quality of inspection results. The asset is equipped with a high-speed rotating stage, which ensures the alignment is consistent to within 1 micron, while also maintaining an accuracy of 1.1 microns. It also includes a high-precision drive model that is capable of driving up to 12 axes, providing the highest quality of wafer alignment in the semiconductor industry. The equipment also includes a variety of advanced measurement tools, such as a patented USB-based system for particle analysis, a high-tech aerodynamic balance, and a powerful tweezers device for small particles removal. The real-time data collection unit allows for continuous data and graph analysis, giving users the insight on their wafer's condition and performance. CANON FPA-3000 I5 is one of the most advanced wafer steppers on the market, and provides impressive levels of accuracy and inspection results. Providing a 25% improvement in optical performance, this machine offers the best possible precision for today's complex semiconductor processes. It is an invaluable tool for semiconductor companies looking for the highest degree of accuracy and results.
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