Used CANON FPA 3000 i5+ #9296955 for sale

CANON FPA 3000 i5+ is a wafer stepper, designed to expose up to 300mm wafers in a highly precise manner. It features a 200mm Lens-on-Chip (LOC) module, with an application field of 36mm, providing high-precision exposure at 5 nanometer resolution. The stepper is able to handle a wide range of production from 6" to 300mm, including LED, MEMS and other optoelectronic applications. It is equipped with a 3-level equipment alignment autofocus mechanism that provides sub-micron accuracy for wafer alignment. Furthermore, the internal exposure monitor also records exposure values at each exposure shot, providing a reliable means of tracking system performance. Equipped with a laser interferometer beam alignment unit, CANON FPA 3000I5+ is able to precisely align each exposure shot. Additionally, the stepper features a sensor-less alignment machine that enables efficient alignment of multiple dies per field. This tool also provides the capability of drilling via or trench alignment capabilities. Overall, FPA-3000 I5+ improves resolving power, accuracy and reliability of exposure. The stepper also offers a variety of options for optical and electrical maintenance. These include lamp control boards, collimator boards, feedback amplifier boards, power supply boards, coolant distribution boards and shutter control boards. In addition to these options, the asset is designed to protect wafers from potential damage due to exposure and processing. This is accomplished through the utilization of an over-exposure control with feedback mechanism and over-dosing protectors, as well as error detection mechanisms. FPA 3000 I5++ is designed with minimization of maintenance in mind, and features a total of only 18 parts per arm, as compared to the 25-45 parts typically needed for wafer steppers. Furthermore, the stepper also features a low cost of ownership, as well as a reputation for long-term performance. CANON, renowned for their precision optics, have also developed an industry-leading alignment accuracy of 3 microns or less, as well as a production model that boasts an average of 166 wafers per hour. Overall, CANON FPA 3000 I5++ is a highly reliable and precise wafer stepper, designed for producing high-quality wafers for various optoelectronic production applications. With its robust design, performance-enhancing systems and options, as well as its low cost of ownership, FPA 3000 i5+ is designed to provide users with a reliable and precise solution for their production requirements.