Used CANON FPA 3000 iW #155018 for sale
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ID: 155018
Wafer stepper
Configuration:
Main Unit: FPA-3000
Illuminator: FPA-3000 I line
(2) A Scope (left and right): i-line, TTL
Reticle Stage: 6", Canon STD
(2) Reticle Sender (switching): Canon STD
U-Lens
B Scope: OFF-Axis
C Scope: OFF-Axis
Laser Head: Zygo, HeNe
CCD OPTF
OA Scope: OFF-Axis
Wafer Stage: Flat Stage
(3) Θ/Z-Tilt Unit (L, M, R): Piezo
(4) Support Mount: Passive Damper
Filter (XY Stage): HEPA
Reticle Changer
Reticle Robot: Type IV
Cassette Robot: Type IV
(14) Cassette Library: Canon STD
(4) Intermediate Library: Canon STD
PPC
Wafer Feeder: Type-VI-R
SCH: Type-VI
PA Unit: 8", Notch
SH: Type-VI-R
Lamp house, 2KW
EWS HP-9000 (712/100)
UPS
CD-80 chamber
(5) HEPA ceiling filter (air)
Power receive box, 3 phase, 200VAC
D-rack: Canon STD
Currently in a warehouse
Can be inspected.
CANON FPA 3000 iW is an automated wafer stepper designed for use in semiconductor manufacturing. The unit's unique design enables it to precisely align individual wafers on a production line, ensuring optimal yield and accuracy in wafer processing. CANON FPA 3000IW is equipped with a unique transport equipment that employs a servo motor system to accurately position and adjust the wafers. This unit can be used to create a customized path through the production line, allowing for higher quality production. The unit is capable of up to 24 wafers per cycle, with a load capacity of up to 500 pounds per wafer. FPA-3000IW utilizes an advanced Opto-Laser alignment machine to accurately detect and identify each wafer's orientation. By combining this technology with the servo motor tool, the unit can precisely reposition the wafer with increased accuracy. The asset is also capable of detecting misalignment and minor irregularities in the surface of the wafer, allowing for greater precision and integrity when handling fragile wafers. The unit's unique optical transport model further optimizes production operations. The unit also features a fast-tracking technology which increases production capacity, allowing for efficient and reliable wafer processing. FPA 3000IW also features several additional components which optimize wafer production performance. The unit is equipped with a pneumatically operated X-Y Wafer Chuck for improved stability and accuracy. A precision air bearing stage allows for precise movement of the wafer during processing. Additionally, the unit has a temperature controlled environment enabled by direct-drive high-speed fans. The temperature controlled environment helps to reduce wafer contamination and thermal distortion. Other advanced features such as the wafer inspection, calibration, and etching systems ensure that each wafer is processed to the highest standard. FPA-3000 IW is a powerful and efficient wafer stepper ideal for production lines requiring precise and reliable wafer processing. Utilizing advanced alignment, optical transport, and temperature control technologies, the unit is capable of consistently and accurately producing production quality wafers. With its high-speed performance, fast-tracking equipment and variety of sensors and accessories, CANON FPA-3000IW is an ideal solution for any operation requiring precise, reliable and high quality wafer processing.
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