Used CANON FPA 3000 MR #293817802 for sale

CANON FPA 3000 MR is a sophisticated wafer stepper developed by CANON for advanced semiconductor applications, as part of its FAB Series. The wafer stepper is specifically designed to meet the challenges of advanced photolithography including the requirement for increasingly smaller features, quicker throughput, and greater accuracy. FPA 3000 MR is capable of exposing dissociated layers on multiple wafers at the same time, having an alignment accuracy of 0.40 micrometers and a depth of focus of up to 0.5 micrometers. In addition, CANON FPA 3000 MR offers fast, fine exposure even in the presence of extreme temperature variations, as it incorporates CANON proprietary, multiple-focus driving mechanism. This ensures superior contrast and allows a wide range of exposure shapes and sizes. The wafer stepper features an enhanced focus control equipment for high throughput, which uses spatial and temporal noise analysis to optimize the focus over the course of an exposure sequence. FPA 3000 MR also offers two types of advanced optical systems, including a High NA (Numerical Aperture) system to enable higher resolution and smaller normalization overlaps, and a backscatter-free and multi-stack unit for exposing dense patterns. CANON FPA 3000 MR has a range of resolution that can go up to 75nm and the wafer size that can be accommodated is 175 mm (8-inch). This stepper also benefits from CANON renowned precision control technology, along with its unrivalled process sensing accuracy. It provides environmental protection and can also be used with a range of materials, shapes, and sizes, as well as a variety of chemical processes, making it ideal for a wide range of industries. Moreover, FPA 3000 MR has an integrated machine for traceability, providing valuable data for QA reviews and process analysis. CANON unique advanced wafer handling technology, combined with the fast and accurate alignment tool, ensures high throughput, robust process control and total traceability. Overall, CANON FPA 3000 MR is an advanced, highly versatile and precise wafer stepper from CANON, ideally suited for industries that require high accuracy, faster throughput, extreme temperature variations and high contrast imaging.