Used CANON FPA 3000 #293828112 for sale

CANON FPA 3000 is a wafer stepper designed for advanced IC inspection and lithography. It is equipped with a dual-stage, high precision motorized reticle stage designed to improve throughput, increase accuracy, and reduce vibration. CANON FPA-3000's high-performance optical equipment features a six-lens design to correct aberrations such as coma, field curvature, chromatic aberration, and distortion for enhanced imaging performance and printing accuracy. The wafer stepper uses a built-in automated aligner to detect die features and align the wafer. The aligner is able to detect features as small as one-fourth micron resolution, and the auto-align function can be used to align the wafer with an accuracy of up to 50 nm. In addition, the wafer stepper also features a built-in overlay system to ensure accurate tracing of wafer surfaces. FPA 3000 is capable of printing up to six targets per shot, depending on the size of the wafer. The printing resolution is as fine as 10 nm, and the stepper is equipped with a wavelength-tunable laser diode designed to maintain a consistent exposure intensity and ensure optimized alignment performance. In order to reduce vibration, FPA-3000 is equipped with a damped-vibration table and an integrated isolation unit. The table is designed to dampen vibrations at up to 0.2 Hz, while the isolation machine reduces equipment-level vibration by up to 90%. The wafer stepper also features a patented, ultra-low F value-3 objective lens, which improves precision by minimizing aberrations due to internal lens reflections. CANON FPA 3000 is capable of printing with a variety of exposure wavelengths, from deep ultraviolet (DUV) to visible (VIS). It comes equipped with a built-in laser powermeter for precise exposure measurement and control. The wafer stepper also includes several embedded inspection applications, including critical dimension (CD) measurement, defect review, and pattern analysis, as well as a library of post-lithography image analysis algorithms. Overall, CANON FPA-3000 wafer stepper is a powerful lithography machine that can be used for advanced IC inspection and lithography. Its advanced features include a dual-stage, high precision motorized reticle stage, automated alignment for optimized printing accuracy, a wavelength-tunable laser diode, and several embedded inspection applications. FPA 3000 is designed to achieve accurate printing results, and its built-in laser powermeter ensures precise exposure control.