Used CANON FPA 3000 #9145280 for sale

CANON FPA 3000
Manufacturer
CANON
Model
FPA 3000
ID: 9145280
Vintage: 1997
Stepper HP-UX Workstation 1997 vintage.
CANON FPA 3000 is an advanced wafer stepper designed to create high-precision patterns for semiconductor fabrication. With its high throughput, precision alignment, and powerful imaging technologies, CANON FPA-3000 is an ideal tool for production of any semiconductor. FPA 3000 offers unsurpassed overhead-view optical imaging with its Automated Beam Alignment (ABA) technology. This equipment uses proprietary software algorithms to guide the scanner, resulting in improved throughput and more accurate mask placement. ABA also provides automated focus through a full-field automatic focus system (AF). This unit minimizes focal plane variation, significantly reducing focus shift, which can degrade image quality on advanced semiconductor devices. FPA-3000 is also equipped with an automated calibration machine (ACS). The ACS uses three-dimensional nanoprobing sensors to precisely control imaging parameters like position and contrast. This allows for highly uniform exposure, maintaining image quality across multiple layers. Additionally, it can correct high-frequency alignment errors resulting from lens aberration, and dynamic frequency changes to match layers with high-contrast imaging needs. CANON FPA 3000 also features a high resolution Color Corrected Super High Contrast Mask (CHCM) feature. CHCM utilizes specialized mask technology to significantly reduce line-edge roughness and maintain high precision imaging even on challenging advanced semiconductor structures. Additionally, CANON FPA-3000 is armed with an Optical Density Control Mechanism (ODCM) which allows tuning of the intensity of the light source based on the material being etched. This produces a highly uniform pattern depth and contributes to a high-yield, high-performance image. Finally, FPA 3000 comes with detailed online technical support to help users make the most of its capabilities. The intuitive user interface allows easy access to the many functionalities, simplifying the process of setting up and running the machine. Overall, FPA-3000 is a powerful wafer stepper that can create fine, precise lithographic patterns with speed and ease. Its advanced imaging and auto-focus capabilities make it an ideal choice for those demanding advanced imaging performance for advanced semiconductor fabrication.
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