Used CANON FPA 3000 #9145281 for sale

CANON FPA 3000 is a high-performance, multi-functional wafer stepper capable of handling a wide range of production needs. The equipment is designed to increase throughput and reduce manufacturing costs, while maintaining a high level of accuracy and precision. CANON FPA-3000 features a modular design with the main components assembled into a single frame. It creates superior levels of optical performance by utilizing an advanced lens system and a four-stage diffractive head assembly. The unit is capable of lattice-based patterning and can also provide off-axis illumination to further improve resolution and accuracy. This enables a theoretically unlimited number of features to be patterned onto flexible substrates. The stepper is capable of handling a variety of wafer sizes, ranging from 125mm to 650mm. It has a maximum accuracy of 0.1 microns and a speed of up to 65 wafers per hour. The stepper is also capable of precise lithography with 14 micron step/repeat accuracy. This is supported by an integrated alignment machine with a trusted resolution of 3 microns and an active area of 1.9 mm x 1.9 mm. FPA 3000 is further equipped with a full complement of high-end features including a built-in rotary stage, programmable reticle slide, and a CCD-based alignment tool. FPA-3000 is designed to be highly reliable and robust. It has a long-life LED light source, advanced air flushing, and other features designed to reduce downtime and extend the service life of key components. It is also designed around a cleanroom-compatible enclosure to protect its internal components from any potential contaminants and ensure optimal performance. The integrated controller supports the precise operation of CANON FPA 3000, providing a user-friendly graphical interface for fast and easy operation. The controller also provides logging and diagnostic functions and is capable of remote operation. In summary, CANON FPA-3000 is a powerful and reliable wafer stepper designed to accommodate a wide range of production demands. Its advanced lens asset, high accuracy, and robust construction make it an excellent choice for precise lithography and increased productivity.