Used CANON FPA 5000 ES #9200127 for sale

CANON FPA 5000 ES is a leading-edge lithographic wafer stepper designed to enable manufacturers to accurately and efficiently produce semiconductor devices. It has a 5-micrometer resolution, enabling it to produce high-resolution line/space features down to 0.25 microns in width. This makes it suitable for the fabrication of high-volume and advanced semiconductor devices. The external dimensions of FPA 5000 ES are 2710 x 1750 x 1625 mm, with a standard field size of 50.8 x 50.8 mm. The power supply of the stepper is an industry-standard AC100/AC200 voltage range, with an optional DC/AC300 power supply upgrade. CANON FPA 5000 ES has a three-lens design utilising field angles of 0°, 90° and 277° to cover the full 50.8 mm field area. An optical demagnification of 4.0x gives the stepper a greatest depth of focus and high image height accuracy. FPA 5000 ES uses a three-stage telecentric illumination equipment which enables a precise placement of lithographic features without flare. The illumination is adjustable in terms of intensity and homogeneity over the full field area, facilitating the production of optimized lithographic patterns. With its Multi-Projection imaging system, CANON FPA 5000 ES can simultaneously expose multiple field sizes while keeping high uniformity of field-to-field exposure. It is also possible to expose fields of different sizes at different times, depending on the lithographic job. In addition to its standard features, FPA 5000 ES also has an optional FPD Module (Flat Panel Display) for lithography of glasses. This module allows flat pattern exposure with high accuracy, enabling the fabrication of semiconductor devices with small, sharp structures. CANON FPA 5000 ES is a powerful wafer stepper distinguished by its superior resolution and compatibility with multiple lithography systems. Its energy-saving operation mode, advanced illumination unit and Multi-Projection imaging machine make it an outstanding tool for the production of high-volume, high-quality semiconductor devices.