Used CANON FPA 5000 ES2+ #293748673 for sale
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ID: 293748673
KrF Scanner
Does not include CYMER Laser
Missing parts:
7702-05X Laser head
B180L Housing
Image shifter
MBX Driver
SH Unit (L)
SCH-RΘ Robot
Reticle cassette robot
Masking unit
Relay housing Z-Axis motor and driver
RC Cassette robot Z Axis motor and driver
Robot controller
RC Internal LIBE Elevator control
PA Unit: L, fine type
Console flat panel
Alignment monitor
SV7 Solenoid valve unit
Library belt
Cable assembly: RCRO-1, RCLB-2
MB Driver: WY, R, WLC
Library LM: Guide, Ball, SUS
Motor drive unit: WQMBY, WZRX
Reticle robot
RC Robot relay cable
EXPO-CD PCB Assembly
Image processor PCB Assembly
MO Drive
IP Board
RTCAM Board
C-Oil temperature controller
Measurement board
SCSI Extender PCB
CAP6 PCB
DMP DSP PCB
IO DSP PCB
RT DSP PCB.
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