Used CANON FPA 5000 ES2 #293817781 for sale

CANON FPA 5000 ES2
Manufacturer
CANON
Model
FPA 5000 ES2
ID: 293817781
Stepper Numerical Aperture (NA): 0.68 Resolution: 180 nm DCO: 35 Throughput (WPH): 65-300.
CANON FPA 5000 ES2 is an ultra-high precision wafer stepper with the highest accuracy and resolution capabilities in the world. It is capable of capturing the sub-micron patterns of semiconductor devices at the most advanced geometries and designs. FPA 5000 ES2 is equipped with CANON proprietary Ultra-High Resolution Photo Mapping Equipment (UHRM) which enables precise imaging of 0.25um(90nm) resolutions with an overlay accuracy of 0.1 micron(30nm). The advanced optics design and advanced high ripple lens coating reduce aberrations and effectively corrects chromatic and lrfocus distortions. The high power LED illumination system is tightly integrated with the optimized wafer lens and frame to ensure precise exposure times, repeatability and optimal imaging results. The highly precise and reliable linear motors used in CANON FPA 5000 ES2 allow for extremely accurate and repeatable micro-movement of the wafer stage and expose time. The motor driven wafer stage is aligned to an accuracy of 0.02 micron and automatically adjusts itself to assure accuracy and performance regardless of changes in track over time. FPA 5000 ES2 also incorporates CANON unique self-learning control unit that recognizes the characteristics of device patterns and optimizes exposure to suit them. This innovative machine allows for excellent image uniformity and superior image quality. The wafer stepper also features an advanced automation tool for coordinating the production of semiconductor devices. The software can integrate with current factory systems and can be customized to suit the specific needs of the production environment. Overall, CANON FPA 5000 ES2 is the ideal tool for producing the most intricate semiconductor devices and components. Its advanced imaging capabilities, precision linear motors and motion control, and automated production systems enable it to deliver optimal performance in demanding scenarios.
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