Used CANON FPA 5000 ES2+ #9200129 for sale

CANON FPA 5000 ES2+ wafer stepper is a state-of-the-art, lithography solution designed for advanced semiconductor device fabrication. It is the latest evolution of the ES2 series of wafer steppers and provides improved imaging performance and higher productivity. As an exam-centric equipment, CANON FPA-5000 ES2+ has been designed with an impressive suite of features to help users achieve their device fabrication goals. The scanning stage of FPA 5000 ES2+ is the heart of the system and features an ultra-precise scan axis servo drive that ensures smooth motion with very low angular acceleration and velocity ripple. This provides excellent overlay performance and long-term stability in overlay measurements. The unit also features a large field-of-view (FOV) capability with maximum areas up to 17-inch square. With high scan speeds of 850 microns per second, it is capable of fast throughput. The optics of FPA-5000 ES2+ are designed to combine high performance and stability. It offers a large depth of focus (DOF) at 0.8 µm and an advanced numerical aperture (NA) that reaches 50 mm. It also features excellent exposure uniformity with a long-term stability (LTS) of 0.2 % at 0.5° tilt angle and 50 mW/ cm2. To complete the machine, CANON FPA 5000 ES2+ is equipped with an advanced Deuterium and Xenon illumination source that offers superior optical performance and stability without affected by environmental conditions. It also offers an automated TOPSENCHECK AXIS tool that provides precise sample alignment during device fabrication. In addition to its impressive performance, CANON FPA-5000 ES2+ also offers excellent asset maintenance and documentation features. It includes an exquisite real-time SmartScope API that allows users to view, monitor, and control microscope components, while the integrated Scanning Electron Microscopy (SEM) software package makes it easier to view and observe cross section data for process analysis. All in all, FPA 5000 ES2+ is an advanced wafer stepper designed with an improved suite of imaging, performance, and maintenance features for advanced semiconductor device fabrication. With its state-of-the-art technology, FPA-5000 ES2+ is one of the most reliable wafer steppers for high resolution imaging, long-term stability, and high throughput.