Used CANON FPA 5000 ES3 #9104392 for sale

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Manufacturer
CANON
Model
FPA 5000 ES3
ID: 9104392
Stepper, 8" KrF Scanner No laser CYMER Laser 2001 vintage.
CANON FPA 5000 ES3 is a state-of-the-art wafer stepper designed for precise and cost-effective lithography. It features advanced air bearing technology, allowing for highly precise and accurate positioning of the stepper's components. CANON FPA 5000ES3 is constructed from industrial grade materials, making it robust, reliable and long lasting. The stepper is powered by a 200W laser equipment, enabling it to accommodate a wide range of wafer sizes and shapes. This enables it to efficiently produce precise patterns on both flat and irregularly-shaped substrates. The laser system features a relative exposure accuracy of less than 0.2 micrometers and an exposure repeatability of less than 0.3 micrometers. The stepper also utilizes a high accuracy, non-volatile, non-magnetic laser encoder. This encoder ensures that the stepper always produces the precise pattern intended. There is also a multi-axis gate unit, which makes it possible to switch between exposure directions quickly. This makes it possible to produce extremely complex and intricate patterns with ease. FPA-5000 ES3 also features an industry-leading alignment machine that utilizes multiple laser interferometers and linear encoders. This gives the stepper the ability to efficiently align wafers with a accuracy of fewer than 1 micron. This provides users with the confidence that their patterns and layers will be reproducible and exact. Additionally, this stepper also features a built-in source control tool, ensuring that the laser beam is always in its optimal intensity range. CANON FPA-5000 ES3 also provides users with a comprehensive suite of inspection tools. It can accurately detect points of contamination that are not visible with the naked eye. This allows it to remove any point sources of error that could potentially cause serious compliance issues. Additionally, the stepper can also detect particulate contamination which could otherwise slow down the production process. Finally, FPA 5000 ES 3 comes with a wide range of options and accessories that allows for its customization. This makes it an ideal product for any customer with a need for specialized lithography. Its advanced features, robust design and overall performance make it an excellent choice for those looking to increase their productivity and reduce costs.
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