Used CANON FPA 5000 ES3 #9147053 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

Manufacturer
CANON
Model
FPA 5000 ES3
ID: 9147053
Stepper, 8" KrF Scanner No laser 2001 vintage.
CANON FPA 5000 ES3 is a wafer stepper, an advanced semiconductor lithography equipment used for photolithography processes in the fabrication of integrated circuits. It offers a variety of imaging performance features, including high-precision mask alignment and exposed wafer alignment. CANON FPA 5000ES3 uses a stepper-type exposure system to image the chip patterns on the wafer. The unit features a 254 nm lens with a numerical aperture of 0.52, an all-reflective illumination machine, and a flat-top field illuminator. The tool is capable of an effective resolution of 0.35 μm (2400 dots/inch). FPA-5000 ES3 has a large 5-megapixel sensor that can detect optically zoomed registration marks, and a trinocular alignment asset with an autocollimator. Its image distortion feature corrects for any wafer inaccuracy to ensure maximum yield. It is also equipped with an automated focus model, which facilitates accurate and consistent imaging. Additionally, its quartz-glass construction ensures high-precision step and repeat operations, and it supports auto-centering of the wafer. CANON FPA-5000 ES3 is designed to process a variety of wafer sizes, including 100 mm, 125 mm, 150 mm, 200 mm, and 300 mm. It utilizes P-MBE acquisition software to enhance its processes. P-MBE controls the wafer loading and unloading, exposure, optical metrology, and other processes to optimize yields. The equipment is designed with safety mechanisms such as multiple light shield curtains to ensure personnel safety. Its control software also utilizes an integrated process monitoring system to alert personnel to any unit malfunctions. CANON FPA 5000 ES 3 is equipped with advanced software to improve throughput and enable reproducible imaging results. The machine is also customizable to allow users to fine-tune their imaging parameters. Lastly, it features a user-friendly interface with powerful process management capabilities. FPA 5000 ES 3 is the perfect solution for advanced lithography processes, as it offers reliable performance and quality outputs.
There are no reviews yet