Used CANON FPA 5000 ES4 #9282327 for sale

CANON FPA 5000 ES4 wafer stepper is a piece of advanced semiconductor lithography equipment. Designed for use in semiconductor fabrication plants, this stepper utilizes advanced projection optics and retainers to support a wide variety of wafer shapes and sizes. Its ultra-low laser reflectivity design ensures superior image quality and enhanced imaging accuracy, while its extremely fast processing speed reduces cycle times, increasing throughput efficiency and lowering overall costs. CANON FPA-5000 ES4 provides excellent patterning capabilities thanks to its exceptional numerical aperture (NA) of .83, which enables a wide depth-of-field and improved process latitude. Its large field size of 9" (228.6 mm) offers flexibility for wafer processing, while its 1/6 millisecond exposure time ensures high resolution and throughput levels for smaller features down to 0.33µm. The stepper ensures repeatability thanks to its precision on-axis reduced steering equipment, ensuring precision alignment of the wafer to the projection optics. Additionally, the system also includes an integrated vacuum unit for reducing wafer flange loading and handling of thin substrates. The machine features a host of automation options and capabilities, such as an integrated wafer loader and stocker, as well as fully automated wafer retrieval and movement. Its advanced lift reticle stage offers a range of alignment functions for improved speed and accuracy of reticle placement. The tool is also easily upgradeable with a range of additional optional components, such as an advanced OCR Air Scanner which offers high-precision measurements over a range of wafer sizes. Finally, FPA-5000 ES 4 features advanced safety features, such as an emergency stop to shut off laser operation in case of an unforeseen incident. It also includes powerful monitoring of electrical, mechanical, and environmental conditions in and around the stepper, offering a safe, highly reliable processing experience. In addition, the asset is certified for global use, meeting all applicable safety standards.