Used CANON FPA 5500 iZ+ #293825879 for sale
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ID: 293825879
Vintage: 2005
Stepper
Illumination system
Reticle preset
Wafer stage
Air control
Reticle library
Reticle handler
Wafer handler
Control board
C-Rack
Lamp house
Controller panel
PP Box
TDK TAS300 FOUP
RASCO TBW-CD160 Compact chamber
2005 vintage.
CANON FPA 5500 iZ+ is a high-performance wafer stepper equipment, offering outstanding performance and reliability for advanced photolithography production. It is the latest model from CANON FPA Series, building on the outstanding imaging performance and image quality of the previous models. It boasts the world's highest resolution, shot-to-shot repeatability, and low depth of focus among its peers. CANON FPA-5500IZ+ features a newly developed dual-staged illuminator offering advanced imaging performance and unparalleled accuracy and repeatability of production. It features a unique image-stabilizing system combined with a dual-illumination unit to ensure reliable transfer of patterns. The machine is extremely efficient due to its advanced trajectory, shape, and reticle both stages. With an efficient back-end processing, the tool reduces turn-around-time for production of substrates. FPA 5500 IZ++ comes with an enlarged image size of 400mm, up from previous models. It also increases the APC (Auto Pattern Centering) accuracy, reducing waste of time and substrates significantly. Its advanced lithography asset is engineered to ensure perfect transfer of space resolution and pattern placement. CANON has designed an 'Ozone Removal Model' that prevents the detrimental effects of ozone deposits on the lens due to prolonged exposure. It also results in a reduction of aberrations like flare and ghost, which leads to an improved imaging process. FPA 5500 iZ+ features a unique electro-stabilization equipment, preventing fluctuations in the image area and achieving consistent imaging performance. Its integrated processing includes programs like Extended Focus, Just Focus and Field Feedback, increasing development speed and improving overall performances of the system. In addition to its impressive technical specifications, CANON FPA 5500 IZ++ is fast, dedicated and reliable. Its illumination stability and mechanical stability further ensures superior beam stability and image resolution. FPA-5500IZ+ is a great choice for those looking for a high-performance wafer stepper unit for production.
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