Used CANON FPA 5500 iZ #9235467 for sale

CANON FPA 5500 iZ is an advanced wafer stepper, designed to achieve exemplary imaging performance and accuracy. This equipment is a nitrogen-gas-cooled stepper that uses deep ultraviolet (DUV) lithography technologies to process microchips and other semiconductor devices. CANON FPA 5500IZ has a highly-accurate main imaging system comprised of a multi-layer design, high-efficiency illumination unit, and a rotary encoder. The multi-layer design partially absorbs background light in order to enhance edge contrast while the high-efficiency illumination machine helps to relay the correct alternating imaging levels. Meanwhile, the rotary encoder provides accurate positional information. FPA-5500 IZ also features 0.0050µm cell accuracy with 0.00024nm line accuracy, resulting in a high level of pattern placement accuracy. It also features 0.5nm CD uniformity and 0.0015µm image accuracy for excellent imaging performance. Furthermore, the tool's illumination optics uses a 5x reduction optics with an numerical aperture of 0.60. The high-performance imaging and accuracy of FPA 5500IZ is further enhanced by its automated calibration, which minimizes adjustment errors. It is also equipped with a number of other external controls, such as a fast-track asset that allows quick exposure and shading correction, auto-stage pattern alignment, and an on-axis autofocus model to maintain optimal imaging focus. Additionally, the equipment features a reduction of particle load due to air cooling, as well as effective air filtration with particles as small as 0.1µm. The overall design of FPA 5500 iZ is durable and reliable, with a low pressure (6 Pascals) in its chamber. By providing outstanding imaging performance, accuracy, and reliability, this system is an ideal choice for those who need to create complex images with exacting precision.