Used CANON FPA 5500 iZ #9247811 for sale

CANON FPA 5500 iZ is a wafer stepper ideal for use in the manufacturing of semiconductor components. It features the Precision Gap Control Technology (PGCT) that is designed to increase accuracy, speed, and throughput while still maintaining the ability to produce the highest quality wafers. This machine is capable of stepper operations at resolutions of up to 0.1 µm for patterning both positive and negative tone resists. Additionally, the machine has a high output of 1000 wafers/hr, making it well-suited for commercial production. The stepper is built with a 4-dimensional stage that features an integrated inchworm motor for smooth, precise handling of wafers. This allows for the positioning accuracy of the alignment equipment to be increased and ensures consistent performance over a number of wafers. Further, the wafer table is equipped with a temperature control system and a temperature monitoring unit in order to better ensure wafer-level homogeneity. This machine utilizes a 5KW ultra-high pressure mercury lamp with an exposure rate of up to 2.9mJ/cm2. This enables patterning resolution from 0.3μm to 10μm, with intricate details achieved with conformal lens technology as well as improved etching of shallow layers. CANON FPA 5500IZ also offers an Automatic Spacer Loss Detection, allowing for automatic detection of spacer loss failures within a single cycle. This greatly increases reliability and decreases the chance of errors due to human oversight. This tool has a high-resolution Cross Stage XY, specifically designed to meet the rigorous requirements of precise positioning and high repeatability. It is equipped with an integrated ring encoder, absolute chromatic measurement, and an angular-motion detent design, providing the highest accuracy of wafer stem positioning. FPA-5500 IZ also features an Automatic Zone Setting function for rapid setup of uniform exposure settings. This is an advantageous function that simplifies the setup process and enables fast exposure of wafers that have either a mixed design or feature a complex pattern. FPA 5500 iZ is also backed by superior after-sales service through CANON service network, which includes an online management asset, technical and engineering support from qualified personnel, and a range of additional options such as remote troubleshooting. In conclusion, FPA 5500IZ is an advanced wafer stepper model that offers excellent performance and reliability. With its high speed and accuracy, it is well-suited for the production of high-precision and intricate patterns in the semiconductor industry.