Used CANON FPA 5500 iZ+ #9251794 for sale

CANON FPA 5500 iZ+
Manufacturer
CANON
Model
FPA 5500 iZ+
ID: 9251794
Wafer Size: 12"
Vintage: 2003
Stepper, 12" 2003 vintage.
CANON FPA 5500 iZ+ is a wafer stepper designed for semiconductor fabrication applications. The iZ+ is a flagship model of CANON stepper series, capable of producing patterns with exceptionally high accuracy and high levels of throughput. The stepper is a 6-axis device, with each axis independently programmable for nanometer-level precision. It uses a long-working distance lens with a diffraction-limited resolution of 1.2 micrometers, enabling it to produce patterns with sharp edges and smooth surfaces. It uses a high-power CCD camera with a maximum resolution of 1024 x 1024 pixels. The iZ+ is also capable of producing deep-submicron patterns. Its specialized advanced opto-electronic shuttered system (AOSS) can produce patterns with a minimum line width/space width of 0.30 micrometers, providing superior patterning for 3D semiconductor devices. In addition to its pattern-digital is an 18 input pin sense driver station that can be used to control IP-block cross-connection signals for complex fabrication processes. The iZ+ also features an automated measurement system, which enables the stepper to measure submicron tape placement and ensure that all patterns are properly formed. All necessary alignment data is constantly monitored by the system and communicated back to the main control unit for real-time feedback. CANON FPA-5500IZ+ provides a fast, reliable and high-precision tool for semiconductor fabrication, capable of producing deep-submicron patterns with excellent performance and superior high-accuracy patterning. The stepper is also easy to operate and is backed up by CANON robust customer service. With reliable and comprehensive support, the iZ+ can provide long-term productivity for any semiconductor fabrication operations.
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