Used CANON FPA 5500 iZ #9274953 for sale

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Manufacturer
CANON
Model
FPA 5500 iZ
ID: 9274953
Wafer Size: 12"
Vintage: 2001
Stepper, 12" Reticle, 6" (LIB) Inline: Left to right With ACT12 ((2) Coater / (2) Developer) 2001 vintage.
CANON FPA 5500 iZ is a wafer stepper that is used in the semiconductor industry for fabrication of integrated circuits (ICs) and other microelectronic devices like memory chips, processors, or LEDs. It features an advanced design that helps minimize variations in process accuracy and repeatability on a wide range of devices. The iZ is a step-and-scan system, meaning that it is capable of moving the reticle (the mask on which the design pattern of the circuits is stored) and the wafer horizontally in two steps. The first step is called "pre-alignment", where the reticle is precisely positioned over the wafer. The second step is called "scanning", where a laser beam known as the "exposure" beam is used to project the pattern from the reticle onto the wafer. CANON FPA 5500IZ is capable of operating at a maximum resolution of 0.25 microns (1/4 of a micron) and at a maximum repetition accuracy in the single-digit nanometer range (i.e. a deviation of less than 10nm). It features a high-end image stitching function, which can join several images together to recreate the large reticle patterns with a resolution of 0.25 microns. The iZ also offers a range of advanced alignment capabilities. This includes the alignment of the reticle and wafer to ensure accuracy and repeatability; the capability to do relative positioning of a series of similar fields on the wafer; as well as a just-in-place (JIP) mode that allows for precise and fast pre-alignment of the wafer and reticle without the need for adjustment of the wafer or reticle. FPA-5500 IZ is designed to be a fast, reliable, and high performing platform for the fabrication of devices. It is capable of delivering fast cycle time due to the high precision of its imaging system and its flexible alignment system, which allows for repeatable and accurate field placement. In addition, it offers a range of features such as customizable wafer chucks, fiber optic illumination systems, and an intuitive user interface. FPA 5500IZ is a robust and highly accurate wafer stepper that is suitable for a variety of microelectronic fabrication processes. It is designed for the highest levels of precision and repeatability and offers a number of advanced features that make it an ideal choice for fabrication of ICs and other microelectronic devices.
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