Used CANON FPA 5500 iZ #9275017 for sale

CANON FPA 5500 iZ is a wafer stepper that performs critical lithography tasks in semiconductor fabrication processes. It is an improved version of the FPA 5000 that has an improved optics equipment and higher resolution of features down to 0.09 microns. The stepper uses lens technology comprised of an array of optical elements such as lenses, mirrors, and prisms to transfer an image onto a wafer. It reduces the aperture of the light which allows more precise and accurate placement of the image. CANON FPA 5500IZ has high imaging performance for deep UV lithography, providingPatterns with linewidths down to 0.09 microns (0.009 mm) in both positive and negative resist exposures. It also provides superior overlay accuracy and low process latitude, ensuring tight tolerances on product design. The unit has an improved projection optoelectronic system that increases resolution as well as an improved illumination unit that ensures illumination uniformity over the entire exposure field. This allows customers to obtain optimal results in order to produce their desired patterns. FPA-5500 IZ comes with a host of features that make it suitable for any high precision lithography job. It has a maximum field of 24 X 24 mm and is equipped with a stage translation range of 10 mm for maximum field size and accuracy. The unit is capable of operating at a variety of different wavelengths, including i-line (365 nm), g-line (436 nm), and DUV (248 nm). The machine is also equipped with a high-performance wafer alignment tool that allows the machine to ensure alignment accuracy of above 70 nm with repeatability of up to 20 nm. The machine is highly reliable and stable, with features such as an air ionizer and dust filter. The asset is also equipped with an anti-vibration table allowing for stable image placement of down to half pitch on a wafer. It is equipped with an internal gate valve that helps to prevent contamination of the vacuum chamber. FPA 5500IZ also has a large LCD monitor for easy viewing of imaging information. In terms of automation, CANON FPA-5500 IZ is equipped with an upgradeable controller that can support up to three user-definable auto-loading functions for varying throughputs. It is also controllable via an easy to use graphical user interface (GUI) which allows for full automatic, semi-automatic or manual operation. The machine has a high process speed that reduces exposure times and can handle up to eight wafers per hour. Overall, FPA 5500 iZ is an advanced wafer stepper that offers increased resolution and capabilities with its improved optics systems. It also offers high accuracy in wafer alignment and overlay, plus automation options for increased efficiency and throughput.