Used CANON FPA 5500 iZ #9275447 for sale
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ID: 9275447
Wafer Size: 12"
Vintage: 2001
i-Line stepper, 12"
Reticle, 6"
Inline: Left to right
(2) Coaters
(2) Developers
2001 vintage.
CANON FPA 5500 iZ is an advanced wafer stepper equipment that has been designed for advanced observation, inspection and alignment applications. The system has a high resolution 5.5 inch monitor, an ergonomic operator console and an integrated optical imaging unit. This machine is capable of handling wafers up to 8 inch in diameter and 1mm thick. CANON FPA 5500IZ has five optical channels which offer more than double the optical power of a conventional wafer stepper. This allows for greater accuracy in the alignment and inspection of wafers. The optics also offer a high numerical aperture which ensures a high-level of image clarity and resolution. FPA-5500 IZ utilizes advanced optical imaging techniques such as depth of field and polarization measurements. This allows for precise alignment of micro components on wafers such as pads and solder balls. It also has an integrated infrared laser scanner to detect particle defects. The tool has a high-speed X-Y motor stage that enables rapid wafer transfer for increased throughput. It also features a fully automated micrometer stage for precise alignment of wafers prior to exposure. This allows for the highest degree of accuracy when inspecting or aligning micro components or other features. FPA 5500 iZ utilizes a high-speed CPU with a fast image processing asset to reduce exposure time, which allows for more efficient testing and inspection. It features a user-friendly GUI interface which makes operation of the machine easier and quicker to use. CANON FPA-5500 IZ offers a comprehensive suite of offline software for data acquisition, image processing, and pattern analysis. This provides a complete wafer inspection solution without the requirement of an operator. The model also offers enhanced wafer geometrics, metrology, and defect inspection capabilities. Overall, FPA 5500IZ is an advanced wafer stepper equipment specifically designed for high accuracy inspection and alignment of wafers. It features a wide array of features designed to enhance accuracy, speed, throughput and ease of use. This makes it an ideal choice for any precision wafer processing application where accuracy and speed are paramount.
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