Used CANON FPA 5500 iZ #9293800 for sale

CANON FPA 5500 iZ
Manufacturer
CANON
Model
FPA 5500 iZ
ID: 9293800
Wafer Size: 12"
Vintage: 2001
i-Line stepper, 12" 2001 vintage.
CANON FPA 5500 iZ is a state-of-the-art wafer stepper designed to produce highly accurate lithographic images. This equipment uses advanced Polychromatic Reduction phase-shifting technology to achieve exceptionally high-resolution images with lower distortion and less background noise. CANON FPA 5500IZ offers synchrotron-level image resolution and feature uniformity while improving throughput and reducing developing time. The system is equipped with two high-aperture objectives, the objA and the objB, delivering superb feature resolution, increasing feature linearity and achieving sub-2 nm resolution across the entire field. This allows for greater addressability, enhanced process control, and improved future product scalability. In addition, FPA-5500 IZ utilizes Dual Magnification Imaging, or DMI, a unique feature of CANON Lithography systems. DMI combines two objective lenses to finely focus and adjust image details, offering users the ability to explore new methodologies for accurate characterization of features over a wide range of degrees. The unit utilizes an advanced, integrated step and repeat process that automatically adjusts field size along with exposure parameters. This reduces the chance of exposure errors, ensuring uniformity across the entire field. The on-board wafer staging options, coupled with the high-speed consolidation processes, reduces processing time and improves throughput. FPA 5500IZ is also compatible with the FPA-100 zoom optics machine, a versatile, compact automotive tool for applications with a zoom-lens range of more than 4X. The unit offers three lenses types: 1.8X, 2.2X and 2.8X, allowing users to quickly adapt for the most challenging imaging problems. FPA 5500 iZ utilizes CANON patented MicroLock technology and advanced telecentric optical asset for precision lithography applications. MicroLock prevents exposure misalignment and ensures that patterns are accurately transferred to the wafer. The telecentric optical model uses a statically calibrated reticle equipment for extreme pattern accuracy and repeatability, making CANON FPA-5500 IZ the ideal system for semi-conductor fabrication. CANON FPA 5500 iZ is ideal for those looking for a reliable, easy to use wafer stepper for their lithography needs. The combination of features and advanced technology make CANON FPA 5500IZ an invaluable tool for businesses looking to improve their lithographic accuracy and product scalability.
There are no reviews yet