Used CANON FPA 5500 iZ+ #9293801 for sale

CANON FPA 5500 iZ+
Manufacturer
CANON
Model
FPA 5500 iZ+
ID: 9293801
Wafer Size: 12"
Vintage: 2005
i-Line stepper, 12" 2005 vintage.
CANON FPA 5500 iZ+ is a state-of-the-art wafer stepper designed for integrated circuit (IC) production processes. The device is capable of handling wafers from 200mm up to 450mm in diameter and is able to process wafers at a rapid rate of up to 300 mm/sec. The stepper is equipped with an advanced image-positioning optical equipment that enables precision alignment of the reticle on the wafer, with sub-micron accuracy for each exposure. This system is also capable of scanning the whole wafer within minutes and detecting any flaws or defects. Furthermore, the FPA 5500 features precision stage motion control which enables uniformity of exposures and extremely accurate wafer-to-reticle alignment across the entire surface of the wafer. The stepper has a compact design which allows for the machine to be installed in a variety of configurations, without the need for a costly transfer unit. Furthermore, it has automated maintenance functions which monitor the condition of the machine and carry out necessary preventive and corrective maintenance to ensure a reliable production process. The device is powered by an Advanced On-Axis Illumination Tool (AOIS)that uses high-performance LEDs to provide a uniform light intensity across the entire exposed surface of the wafer. Moreover, the asset uses an optimized UV spectrum to render the highest possible resolution for greater clarity and edge definition, as well as a higher depth of focus according to the wafer type and thickness. The unit also features a high accuracy diffractive optical element that projects a uniform field of sharp illumination on the wafer, providing nearly perfect image uniformity and versatility of exposure. In addition, the FPA 5500 is fitted with CANON iZ Monitor Model, which records and reports precise exposure data in real-time, allowing precise and error-free operation. To ensure the highest levels of quality and productivity, CANON FPA-5500IZ+ is designed with an integrated quality assurance equipment. This system records any process changes, making them easily retrievable for process improvement and preventive maintenance, and allows for sharing of process data between facilities. Furthermore, FPA 5500 IZ++ is equipped with an Auto Alignment Unit to enable quick, accurate reticle-to-wafer alignment which ensures repeatable product quality. FPA 5500 iZ+ is a reliable, precision device and provides the very best in IC production technology. With its impressive speed of up to 300 mm/sec, the stepper offers an extraordinary amount of detail in each exposure, while its existing wafer handling components can easily be upgraded to accommodate even more demanding tasks.
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