Used CANON FPA 5500 iZ #9350968 for sale

CANON FPA 5500 iZ
Manufacturer
CANON
Model
FPA 5500 iZ
ID: 9350968
Wafer Size: 8"-12"
Vintage: 2001
i-Line stepper, 8"-12" 2001 vintage.
CANON FPA 5500 iZ is a state-of-the-art wafer stepper that is used to fabricate semiconductor and opto-electronic devices. It is capable of producing micro- and nano- scale features, resulting in increased precision and performance. At the heart of the machine is the integrated ZAP dual-beam optics equipment, which combines a 5,500 mm pulsed laser with a differential imaging (DIF) configuration, for improved photolithography performance. CANON FPA 5500IZ also includes a 600 mm rectangular projection lens, allowing for fast scan speed and reduced distortion. FPA-5500 IZ has a wide field area of 425 mm, and is equipped with an innovative feature-based on-axis alignment (FOBAW) system, for improved accuracy and repeatability. Its high-precision X-Y stages are capable of highly accurate independent motion and scan guidance. For high productivity and increased reliability, the machine is designed with a reduced tool set-up time. In terms of performance, CANON FPA-5500 IZ is capable of producing high precision etched and/or coated devices with a minimum feature size of 0.5 µm. The unit is also equipped with diffraction blur reduction technology, which can reduce the effects of diffraction-induced mask errors. Its advanced stage control machine includes a unique Memory Resonant Scan (MRS) technology that enables quicker mask-to-wafer alignment and faster patterning. In addition, FPA 5500 iZ is designed with several features that increase safety, efficiency and cost-effectiveness. It is equipped with a laser safety monitoring tool, which monitors the machine's environment to ensure laser safety. The machine is also capable of generating heat that can be dissipated by a forced air asset, preventing damage to components and improving energy efficiency. Finally, a programmable logic model provides an interactive interface for quick and easy job control. FPA 5500IZ is a cutting-edge wafer stepper that offers superior precision and performance for demanding production requirements. Its advanced features, such as FOBAW, MRS and laser safety monitoring, ensure that it is highly reliable and cost-effective. As such, CANON FPA 5500 iZ is an ideal choice for the fabrication of semiconductor and opto-electronic devices.
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