Used CANON FPA 5500 iZa #293606891 for sale

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Manufacturer
CANON
Model
FPA 5500 iZa
ID: 293606891
Wafer Size: 12"
Vintage: 2005
i-Line stepper, 12" Process: i-Line wide-field FOUP Load port (2) SMIF Indexers Lens performance Does not include Hard Disk Drive (HDD) Power supply: 200 VAC, 3-Phase 2005 vintage.
CANON FPA 5500 iZa is a wafer stepper designed for manufacturers of semiconductor devices who require precise alignment and exposure solutions. It is a single-beam projection-aligner type that provides users with advanced levels of accuracy and uniformity. CANON FPA-5500IZA is equipped with an array of features that are designed to improve the overall process by creating a quality product with fewer mistakes. The illuminated field size ranges from 7.5 to 55 μm, while its minimum feature size is 0.5 μm. The stepper has an alignment accuracy of up to 2.5 μm, with a minimum measurable line width of 0.15 μm. FPA 5500IZA has a mechanical stage that can move in three axes (X, Y and Z) for minute adjustments for both alignment and exposure. Additionally, the stepper has a high-resolution imaging system for fast and accurate registration of alignment marks. It is further equipped with both automatic and manual focus control for further accuracy and repeatability. FPA-5500 IZA also has an extensive exposure system, which includes a shutterless laser source that ensures product consistency across multiple batches. This system has been integrated into the stepper itself, allowing it to adapt to a wide range of exposure objectives. An improved low reflective mirror also reduces total exposure time and yields better image accuracy. The stepper is designed to be user-friendly, with its user-friendly graphic display terminal and a suite of software. This software suite allows for automated input and control for a range of manufacturing processes, including alignment, exposure and post-exposure processing. The stepper can be operated in various modes, such as manual or automated, as well as in offline or online mode. CANON FPA 5500IZA is designed to provide manufacturers with superior accuracy, repeatability, and speed. It is a versatile and highly adaptable stepper that is perfect for manufacturers of semiconductor devices. It can be programmed for a wide range of processes, with its user-friendly interface making it easy to use. Finally, its innovative design is designed to improve the overall manufacturing process, resulting in superior products with fewer mistakes.
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