Used CANON FPA 5500 iZa #293754594 for sale

Manufacturer
CANON
Model
FPA 5500 iZa
ID: 293754594
Vintage: 2005
I-Line stepper 2005 vintage.
CANON FPA 5500 iZa is a state-of-the-art large-scale wafer stepper designed for semiconductor manufacture. Providing excellent throughput even for high-resolution patterning, it offers a mix of both cost-effectiveness and performance. It offers single exposure at a time, with full four-D (3D+E) wafer alignment and four-D feedback available. Its reticles are held in a cassette loading equipment for convenience and reliability. CANON FPA-5500IZA has a wide 5x6mm field of view, and provides 100x acceleration over standard scan times, enabling it to process up to 17,000 die per hour, dependent on reticle size. The wafer stepper also features a high-performance, high-precision focusing system, with an alignment accuracy of +/-3nm and a focus of 1.72um. This delivers extremely tight tolerance, regardless of reticle and wafer size, allowing for production output of reliable and high-performance components. The machine is flexible in its operational approach, with various features to optimize production, such as multiple exposure and auto image processing. A software suite is also available, with a range of automated options for precollect, shot, verification and history transfer. Finally, throughput and productivity is further improved by its automatic reticle exchange unit, which can exchange both standard and step and repeat reticles quickly and efficiently. FPA 5500IZA is a premium wafer stepper, designed and developed by CANON to provide both cost-effectiveness and performance. Its wide field of view, high-performance focusing machine, flexible operational approach and range of automated options allows for production of reliable components with high throughput and productivity.
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