Used CANON FPA 5500 iZa #293799914 for sale

Manufacturer
CANON
Model
FPA 5500 iZa
ID: 293799914
i-Line stepper.
CANON FPA 5500 iZa is a state-of-the-art wafer stepper, designed for the advanced fabrication of a wide variety of semiconductor components. This machine is an ideal choice for high-volume production, offering a high-load platform, increased productivity, and exceptional accuracy and repeatability. CANON FPA-5500IZA features an integrated dual-plane alignment equipment, allowing for accurate, fast, and easy placement of various types of source and destination substrates. Its 5-axis motion platform has 2 linear drives, two rotary axes, and one axis dedicated to rotation of the chuck. This motion platform is capable of handling a wide range of substrate sizes and shapes, enabling the printing of intricate, tiny features with micron-level precision. FPA 5500IZA also features CANON unique Aspheric Optics System (AOS), which minimizes aberration for superb pattern placement accuracy, offering sub-micron registration and overlay accuracy. This unit also eliminates the need for specialized tooling, providing the customer with more flexibility and control. The FPA 5500 is compatible with multiple wavelengths, from 157nm to 248nm, and can accommodate the full range of conventional, resin and thermal resist materials. The laser scanner is integrated with the largest aperture and allows precise control of thebeam angle. The FPA 5500 can also utilize a humidity sensing machine for optimal film conditions and includes on-line corrections to protect the device against environmental changes, such as gas or vapor contamination. The FPA 5500 also features a comprehensive software suite, capable of integrating various design requirements and fabrication processes, as well as automated resist development and film layer control. The user-friendly interface allows easy control over the machine, and CANON on-line process tutorial provides quick access to step-by-step instructions. In conclusion, FPA-5500 IZA is the solution of choice for high-volume production, offering unparalleled accuracy, repeatability, and performance. Its robust motion platform and flexible parameters enable it to accommodate a wide range of substrates, resist materials, and design requirements, resulting in superior device quality and efficiency.
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