Used CANON FPA 5500 iZa #9113707 for sale

CANON FPA 5500 iZa is a high-performance wafer stepper designed for high-volume photolithography applications. It is a high-end tool used to pattern advanced semiconductor integrated circuit devices and features an extremely precise and repeatable imaging performance. The stepper integrates advanced laser-direct imaging technology with high-speed DMD (digital micro-mirror device) projection optics to provide a fast and reliable platform for stepper-based wafer fabrication. The platform consists of an advanced DMD projection assembly, a bright UV laser light source, and a number of sophisticated control systems. With the DMD projection assembly, the stepper can precisely control the image width across the wafer, as well as the position alignment accuracy and coherency of each field. This ensures high repeatability of image across multiple wafers and delivers high-precision device fabrication. The stepper also features high-precision Z-axis drive control, allowing precise focal settings to be achieved while offering a larger swath of exposure for each field. This ensures equal image quality over the entire exposed field, ensuring accurate and consistent device fabrication across all surfaces of the wafer. CANON FPA-5500IZA comes equipped with a high-accuracy auto-focus system for optimizing image resolution, and an advanced metrology reticle correction system for improved field-to-field consistencies. The stepper also has built-in pattern recognition and registration capabilities to speed up mask loading and optical alignment. In addition, FPA 5500IZA utilises advanced thermal management technology to ensure stable operation of the DMD assembly and laser light source, as well as efficient cooling of the optics and optical components. It also has a comprehensive safety system to protect its users against possible laser-induced accidents. To ensure maximum reliability, the stepper utilises image sensors and integrated electronics for enhanced reliability and extended life. CANON FPA 5500IZA also offers a comprehensive suite of process management tools and services, allowing for improved tool utilization and performance. Finally, the stepper comes with an intuitive interface and easy to use software for faster and efficient stepper operation.