Used CANON FPA 5510 iV #293817797 for sale

CANON FPA 5510 iV
Manufacturer
CANON
Model
FPA 5510 iV
ID: 293817797
i-Line stepper Numerical Aperture (NA): 0.18-0.10 Resolution: ≤1000 nm DCO: 300.
CANON FPA 5510 iV is a high-powered and highly accurate wafer stepper designed for advanced semiconductor lithography manufacturing. It features a Nikon cGTO5510 wafer stage that provides short scanning time with ultra-precision for small feature sizes. With a small field of view of 5.5mm and 10-micron step resolution, FPA 5510 iV can handle challenging tasks with ease. The stepper utilizes a CANON VME optical column to deliver extremely fine resolution and high throughput within a wide dynamic range. The scanner mirrors and motorized stages combine to create an integrated equipment with a unified design. This allows for faster throughput and greater accuracy within smaller footprints. CANON FPA 5510 iV comes with an alignment system featuring an easy to use user interface and high sensitivity confocal alignment unit and 2D wireless array. The stepper is also equipped with a superior magnification machine with up to 50x magnification enabling greater depth of focus for higher precision patterning. With an advanced projection tool, FPA 5510 iV can handle a wide variety of substrate materials and film thicknesses ranging from 0.3 micron to 10 microns. The asset uses a combination of resist and mask deposition technology to create patterns of varying sizes and complexity with extraordinary precision. For a comprehensive lithography model, CANON FPA 5510 iV has a selection of advanced features for enhanced productivity. The stepper's intuitive interface allows for quick setup and provides batch processing and recipe management for fast turnaround times. The stepper is also compatible with a wide selection of software to further enhance its performance. FPA 5510 iV also offers various safety features and air cleanliness systems to ensure a safe working environment. With a built-in ionizer, the stepper can minimizes charge and dust buildup on delicate components and improve critical processes. CANON FPA 5510 iV wafer stepper provides a high degree of accuracy and flexibility for precision lithography applications. With its combination of Nikon cGTO5510 wafer stage and CANON VME optical column, it can effectively handle demanding tasks with precision and ease. The stepper's advanced magnification equipment, intuitive user interface, air cleanliness systems, and many other special features make it the ideal choice for high-demand lithography applications.
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