Used CANON FPA 5510 iZ #293654978 for sale
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CANON FPA 5510 iZ is a wafer stepper designed for both research and production applications. It is a high-performance stepper that provides ultra-precise high-resolution imaging capability for challenging high-precision applications. The equipment is housed in a compact, ergonomic design that enables easy access to its features and operation. CANON FPA-5510IZ features a larger field of view compared to most other wafer steppers, which provides more flexibility for a wide range of wafer imaging. The system offers a maximum spatial resolution of 0.02 μm, a maximum working distance of 290mm, and an automatic feature recognition unit with an image distortion detection capability of up to 0.5%. The user interface offers enhanced usability, with a color LCD touch panel display and various operation modes such as auto mode, batch mode, and manual mode. In addition, FPA 5510 iZ stepper features a highly accurate and reliable metrology machine, with fast processing speeds and a wide range of functions to assist engineers in the design and testing of wafer patterns. It utilizes a high-resolution 12Mpix CCD technology for imaging and a multi-axis stage for precise alignment and positioning of the wafer. The stepper also supports a wide range of lithography tools, including softbake, pre-align, exposure, and development. FPA-5510IZ is an ideal choice for production and research applications that require superior imaging capabilities with high accuracy, reliability and repeatability. Its high-precision, ergonomic design and various features enable it to be used in various kinds of research and production environments, providing accurate and reliable results. Its superior imaging capabilities and durable design are just some of the reasons why it is a popular choice for wafer imaging.
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