Used CANON FPA 5510 #293648529 for sale

CANON FPA 5510 Wafer Stepper is an optically-driven, high-speed lithography tool used in the semiconductor manufacturing process. It is capable of multi-up wafer processing, and is equipped with a high-resolution scanner and advanced optics to ensure precise alignment of pattern positions on the wafer during lithography. FPA 5510 is a state-of-the-art wafer stepper that produces high-performance and highly precise patterns on any type of workpiece. Its two-axis equipment offers high precision, accuracy and high throughput, offering a complete lithographic solution for intricate, complex micron scale photolithographic jobs. CANON FPA 5510 has a resolution of about 0.005 um, with a maximum projection area of 640 x 480 mm. It offers high throughput with a throughput speed of 80 wafers per hour. Its accessories include a choice of FPA-FX2TV and FPA-FX7TV reticles for precise patterning, as well as a wide range of recessed and surface alignment systems such as the Dual-D Quadra-D Optive, and the Sharp-Shoot system. FPA 5510 is a fully automated unit and has a microprocessor-controlled operating machine, ensuring efficient and accurate operation. It is also equipped with a built-in vision tool that can detect and measure objects with high precision. Its controller has a built-in 2D metrology asset, and its software has a robust image processing capability. Additionally, its 6-axis X-Y-Z workpiece handling model includes two shift plates, two rotations and two tilt angles. CANON FPA 5510\s software is compatible with a wide range of wafer fab automation systems, allowing it to interface with a variety of process systems and equipments. The software can allow the equipment to process on multiple wafers at the same time, and its system configuration can be easily adjusted to meet the needs of different lithographic jobs. FPA 5510 has a compact, lightweight design that is highly stable, vibration-free and offer maximum compatibility with the user's environment. It has built-in protection against electrostatic discharge and high particle filtration ratings, two air-cooled motors and built-in safety features. CANON FPA 5510 is a highly advanced wafer stepper and is ideal for any microfabrication or high-precision lithography projects. Its high resolution, accuracy and throughput capabilities, along with its advanced features, make it an exceptional choice for any wafer processing needs.