Used CANON FPA 5550 iZ #293817793 for sale
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ID: 293817793
i-Line stepper
Numerical Aperture (NA): 0.45-0.57
Resolution: ≤350 nm
DCO: 45.
CANON FPA 5550 iZ is a highly advanced wafer stepper, designed for demanding micro-lithography processes. This state-of-the-art stepper offers superior imaging capability and excellent device-to-device uniformity. It ensures precise alignment of wafers with its proprietary, highly precise alignment equipment. The stepper can precisely expose and image patterns onto semiconductor and other devices for highly accurate production of devices. It is designed for high-speed production of ultra-large substrates, ensuring unparalleled throughput and productivity. It offers superior resolution, with a minimum acuity of 0.6μm and a uniformity resolution of 0.5μm. With its unique halo illumination system and advanced auto-blanking mechanism, it ensures accurate placement and lithographic uniformity for masking. The stepper supports several imaging technologies, including multi-wavelength exposure and multi-level auto-exposure. It also supports special repeatable focus functions, that enable accurate focusing within different substrates and thin-film of various thicknesses. With its 'XYZ Lens Tuning Function', it ensures precise focusing, further improving the accuracy of imaging. Its optimized, multi-stage vacuum feed unit ensures smooth, efficient and precise movement of the wafers. It also offers excellent high-speed communication capabilities, with a data transfer speed of up to 3.5 MB/s. Its proprietary, highly precise pattern matching machine ensures precise matching of patterns between masks and substrates to ensure perfect device-to-device uniformity. Moreover, this advanced equipment also features a high-resolution robot for handling and positioning wafers. The stepper is designed for easy maintenance and can be easily integrated into various production lines. Its advanced operation capabilities make it suitable for a variety of applications, including photography, micro-electronics, medical devices, micro-mechanics and aerospace. In short, FPA 5550 iZ is a high-precision wafer stepper that is designed to deliver outstanding results and ensure accuracy in demanding lithographing processes.
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