Used CANON FPA 6000 AS4 #293752739 for sale
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ID: 293752739
Wafer Size: 8"
Vintage: 2004
ArF Scanner, 8"
CYMER Laser
CYMER Chamber (MO/PA) non-functional
Reticle, 6"
Cassette: Left
SCSI Hard Disk Drive (HDD)
Wafer loader type: SCH Robot
Reticle alignment: EXA Scope unit
Chamber type: FPA-6000-ASA
CCD
Autofocus mode
PC: HP B2600
Stage leak
2004 vintage.
CANON FPA 6000 AS4 is a wafer stepper designed for use in patterning applications across a range of industries. It features a large stepper table, allowing for accurate alignment of substrate wafers. The stepper includes an advanced air-bearing stage that provides a flat, uniform plane for wafer patterns to be projected onto. Utilising a high-performance projection optical equipment, the machine is capable of delivering a highly precise image resolution when making lithographic masks. FPA 6000 AS4's scanning unit helps reduce misalignments. The patented "Sync-Scanning" feature ensures tight synchronization between the mask and the wafer, providing superior image accuracy. The machine is further equipped with CANON Advanced Digital Filter Processing (DF) technology for detecting and mitigating any leakage radiation. This helps ensure the highest quality pattern accuracy for advanced optoelectronics applications. The stepper is equipped with an automated alignment system that quickly and precisely locates the optimum alignment. This unit helps ensure that masks align perfectly, saving on production time and costs. A built-in measurement machine helps to detect overlaps, generating more accurate results in less time. CANON FPA 6000 AS4 has a low-maintenance design that helps maximize uptime. The stepper can be operated up to 24 hours per day and includes a flexible operation planner that helps keep production running efficiently and smoothly. A variety of maintenance tools, such as an AI-based tool that detects irregularities and reports errors, further helps ensure smooth operations. FPA 6000 AS4 further includes a series of features designed to increase safety. SafeMode ensures that production only occurs during pre-defined time frames, increasing operational safety and eliminating the risk of malfunctions. Finally, the stepper is equipped with a filter replacement warning asset that helps protect against any infiltration of dust particles into the model. Overall, CANON FPA 6000 AS4 is an advanced wafer stepper designed to provide high accuracy and precision for patterning applications. It features an air-bearing stage, advanced image projection, Sync-Scanning, integrated alignment equipment, low-maintenance design, and safety features, allowing it to deliver excellent results in a variety of applications.
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